The effect of short term anneals on the cathodoluminescence of GaAs
This study examines the effect of furnace annealing and rapid thermal annealing (RTA) on the room-temperature cathodoluminescence (CL) image of liquid encapsulated Czochralski (LEC) GaAs substrates. Furnace annealed samples were heated in a tube furnace for 20 minutes at temperatures from 600 to 950...
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| Language: | English |
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University of British Columbia
2011
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| Online Access: | http://hdl.handle.net/2429/32175 |