Studies on sublimed GaAs films, anodic A12O3 films and A12O3/GaAs interfaces

The structural and electrical properties of sublimed GaAs films, the dielectric properties of anodic A1₂O₃ films and the electrical properties of A1₂O₃/GaAs interfaces are of interest from the viewpoint of using GaAs and A1₂O₃ films in thin-film integrated circuits. A new method, the close-spaced s...

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Bibliographic Details
Main Author: Yan, George
Language:English
Published: University of British Columbia 2011
Subjects:
Online Access:http://hdl.handle.net/2429/35121