Nonlinear amplification techniques for inertial MEMS sensors
Inertial sensors, specifically MEMS gyroscopes, suffer in performance with down scaling. Non linear amplification techniques, such as parametric resonance, can be employed in many resonant structures to alleviate this degradation in performance, improve sensitivity and Signal to Noise Ratio (SNR). I...
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Language: | English |
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University of British Columbia
2013
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Online Access: | http://hdl.handle.net/2429/45036 |