Multi-degree of freedom position sensor for planar motors
This thesis presents the development and verification of a multi-degree of freedom (DOF), non-contact position sensor for a magnetically levitated planar motor. Planar motors are intended to replace X-Y stages in various manufacturing processes resulting in higher accuracy, higher speed, and no fric...
| Main Author: | |
|---|---|
| Language: | English |
| Published: |
University of British Columbia
2015
|
| Online Access: | http://hdl.handle.net/2429/54758 |