Design of a MEMS-based optical accelerometer with large measurable range and high sensitivity
MEMS Accelerometers are broadly used in the area of vibration sensor. Their applications range from seismic disturbances, to automotive industry such as airbag systems, active suspension, and smart braking. Traditionally, the acceleration is detected electrically by measuring either capacitive varia...
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| Format: | Others |
| Language: | English |
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University of British Columbia
2008
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| Online Access: | http://hdl.handle.net/2429/823 |