Ion implantation patterning of high temperature superconducting thin films and multilayers

This thesis was motivated by the suggestion that selectively implanting YBa₂Cu₃0₇ (YBCO) films with a highly reactive ion, such as Si, could pattern without destroying or removing material. If true, this would greatly simplify conventional methods of patterning multilayer structures. This led to...

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Bibliographic Details
Main Author: Wong, Andre Wing Gai
Format: Others
Language:English
Published: 2009
Online Access:http://hdl.handle.net/2429/9922