Managing lithographic variations in design, reliability, & test using statistical techniques
Much of today’s high performance computing engines and hand-held mobile devices are products of aggressive CMOS scaling. Technology scaling in semiconductor industry is mainly driven by corresponding improvements in optical lithography technology. Photolithography, the art used to create patterns on...
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| Language: | ENG |
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ScholarWorks@UMass Amherst
2011
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| Online Access: | https://scholarworks.umass.edu/dissertations/AAI3445186 |