A Novel Process for Continuous Thermal Embossing of Large-Area Nanopatterns onto Polymer Films
As imprint lithography becomes commonplace in industrial manufacturing, the need for fast, reliable modifications to the process are of great importance. In particular, the Roll-to-Roll Nanoimprint Lithography (R2RNIL) method has been proven to yield large areas of continuous, robust patterns in th...
| Main Author: | |
|---|---|
| Format: | Others |
| Published: |
ScholarWorks@UMass Amherst
2008
|
| Subjects: | |
| Online Access: | https://scholarworks.umass.edu/theses/200 https://scholarworks.umass.edu/cgi/viewcontent.cgi?article=1259&context=theses |