Impact of Manufacturing Flow on Yield Losses in Nanoscale Fabrics

Reliable and scalable manufacturing of nanofabrics entails significant challenges. Scalable nano-manufacturing approaches that employ the use of lithographic masks in conjunction with nanofabrication based on self-assembly have been proposed. A bottom-up fabrication of nanoelectronic circuits is exp...

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Bibliographic Details
Main Author: Vijayakumar, Priyamvada
Format: Others
Published: ScholarWorks@UMass Amherst 2012
Subjects:
Online Access:https://scholarworks.umass.edu/theses/762
https://scholarworks.umass.edu/cgi/viewcontent.cgi?article=1863&context=theses