Single and double clamped resonator sensors - Design, fabrication and testing

Micro- and nanomechanical single and double clamped resonators are widely being used as mass and temperature sensors due to their high sensitivity, as bio sensors due to their real time label-free detection ability. These resonators have attracted considerable interest from applications like point o...

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Bibliographic Details
Main Author: Islam, Muhammad
Format: Others
Language:English
Published: KTH, Skolan för informations- och kommunikationsteknik (ICT) 2012
Online Access:http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-104160