Modeling and Experimental Studies of High Power Impulse Magnetron Sputtering Discharges
HiPIMS, high power impulse magnetron sputtering, is a promising technology that has attracted a lot of attention, ever since it was introduced in 1999. A time-dependent plasma discharge model has been developed for the ionization region (IRM) in HiPIMS discharges. As a flexible modeling tool, it can...
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| Format: | Doctoral Thesis |
| Language: | English |
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KTH, Rymd- och plasmafysik
2013
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-126264 http://nbn-resolving.de/urn:isbn:978-91-7501-819-5 |