Ohmic Contacts for High Temperature Integrated Circuits in Silicon Carbide

In electrical devices and integrated circuits, ohmic contacts are necessary and a prerequisite for the current transport over the metal-semiconductor junctions. At the same time, a desired property of the ohmic contacts is to not add resistance or in other way disturb the performance. For high tempe...

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Bibliographic Details
Main Author: Smedfors, Katarina
Format: Others
Language:English
Published: KTH, Integrerade komponenter och kretsar 2014
Online Access:http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-156239
http://nbn-resolving.de/urn:isbn:978-91-7595-352-6