MEMS-based electrochemical gas sensors and wafer-level methods
This thesis describes novel microel ectromechanical system (MEMS) based electrochemical gas sensors and methods of fabrication. This thesis presents the research in two parts. In the first part, a method to handle a thin silicon wafer using an electrochemically active adhesive is described. Handling...
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| Format: | Doctoral Thesis |
| Language: | English |
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KTH, Mikro- och nanosystemteknik
2015
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-172955 http://nbn-resolving.de/urn:isbn:978-91-7595-661-9 |