Ultra precision metrology : the key for mask lithography and manufacturing of high definition displays
Metrology is the science of measurement. It is also a prerequisite for maintaining a high quality in all manufacturing processes. In this thesis we will present the demands and solutions for ultra-precision metrology in the manufacturing of lithography masks for the TV-display industry. The extreme...
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| Format: | Others |
| Language: | English |
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KTH, Mätteknik och optik
2011
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-33788 http://nbn-resolving.de/urn:isbn:978-91-7415-959-2 |