Nanofabrication of Zone Plate Optics for Compact Soft X-Ray Microscopy
This Thesis describes the development of the KTH/Stockholm nanofabrication process for diffractive soft x-ray optics. The effort is motivated by the need for and requirement of specially designed diffractive optics and test objects for compact x-ray microscopy as well as optics for other application...
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| Format: | Doctoral Thesis |
| Language: | English |
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KTH, Tillämpad fysik
2006
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-4045 http://nbn-resolving.de/urn:isbn:91-7178-390-3 |