Silicon Nanowires for Biomolecule Detection
Starting from silicon on insulator (SOI) material, with a top silicon layer thickness of 100 nm, silicon nanowires were fabricated in a top down approach using electron beam (e-beam) lithography and subsequent eactive ion etching (RIE) and oxidation. Nanowires as narrow as 30 nm could be achieved. F...
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| Format: | Doctoral Thesis |
| Language: | English |
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KTH, Materialfysik
2008
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-4695 http://nbn-resolving.de/urn:isbn:978-91-7178-902-0 |