Selective Epitaxy of Indium Phosphide and Heteroepitaxy of Indium Phosphide on Silicon for Monolithic Integration
A densely and monolithically integrated photonic chip on indium phosphide is greatly in need for data transmission but the present day’s level of integration in InP is very low. Silicon enjoys a unique position among all the semiconductors in its level of integration. But it suffers from its slow si...
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| Format: | Doctoral Thesis |
| Language: | English |
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KTH, Halvledarmaterial, HMA
2008
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-4801 http://nbn-resolving.de/urn:isbn:978-91-7178-991-4 |