Nanofabrication of Diffractive Soft X-ray Optics
This thesis summarizes the present status of the nanofabrication of diffractive optics, i.e. zone plates, and test objects for soft x-ray microscopy at KTH. The emphasis is on new and improved fabrication processes for nickel and germanium zone plates. A new concept in which nickel and germanium are...
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| Format: | Doctoral Thesis |
| Language: | English |
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KTH, Biomedicinsk fysik och röntgenfysik
2009
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-9800 http://nbn-resolving.de/urn:isbn:978-91-7415-205-0 |