Aberration-Corrected Analytical Electron Microscopy of Transition Metal Nitride and Silicon Nitride Multilayers
Two multilayer thin films have been studied: TiN/SiNx and ZrN/SiNx. A double-corrected transmission electron microscope (TEM) was utilized for imaging and spectroscopy. Imaging was carried out in scanning mode (STEM) for all samples. Energy dispersive X-ray (EDX) spectrometry was used for chemical m...
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| Format: | Others |
| Language: | English |
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Linköpings universitet, Tunnfilmsfysik
2013
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-102176 http://nbn-resolving.de/urn:isbn:978-91-7519-470-7 |