Adhesion measurements of positive photoresist on sputtered aluminium surface
This thesis deals with different methods to improve the adhesion between sputtered aluminium and positive photoresist. Factors controlling the adhesion and different ways to measure the adhesion have been investigated. Different surface treatments prior to resist disposition have been investigated a...
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| Format: | Others |
| Language: | English |
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Linköpings universitet, Institutionen för teknik och naturvetenskap
2002
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-1118 |