Rendering for Microlithography on GPU Hardware
Over the last decades, integrated circuits have changed our everyday lives in a number of ways. Many common devices today taken for granted would not have been possible without this industrial revolution. Central to the manufacturing of integrated circuits is the photomask used to expose the wafers....
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| Format: | Others |
| Language: | English |
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Linköpings universitet, Institutionen för teknik och naturvetenskap
2008
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-11800 |