Epitaxial and bulk growth of cubic silicon carbide on off-oriented 4H-silicon carbide substrates
The growth of bulk cubic silicon carbide has for a long time seemed to be something for the future. However, in this thesis the initial steps towards bulk cubic silicon carbide have been taken. The achievement of producing bulk cubic silicon carbide will have a great impact in various fields of scie...
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Format: | Others |
Language: | English |
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Linköpings universitet, Halvledarmaterial
2015
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Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-121637 |