Atom Probe Tomography of TiSiN Thin Films
This thesis concerns the wear resistant coating TiSiN and the development of the analysis technique atom probe tomography (APT) applied to this materials system. The technique delivers compositional information through time-of-flight mass spectrometry, with sub-nanometer precision in 3D for a small...
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| Format: | Others |
| Language: | English |
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Linköpings universitet, Tunnfilmsfysik
2015
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-122724 http://nbn-resolving.de/urn:isbn:978-91-7685-901-8 |