Quantum Chemical Feasibility Study of Methylamines as Nitrogen Precursors in Chemical Vapor Deposition
The possibility of using methylamines instead of ammonia as a nitrogen precursor for the CVD of nitrides is studied using quantum chemical computations of reaction energies: reaction electronic energy (Δ𝑟𝐸𝑒𝑙𝑒𝑐) reaction enthalpy (Δ𝑟𝐻) and reaction free energy (Δ𝑟𝐺). The reaction energies were calcul...
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| Format: | Others |
| Language: | English |
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Linköpings universitet, Kemi
2015
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-132812 |