A study on the effects of the process parameters of polymerised HMDSO using RF-PECVD in corrosion protection applications
In this master thesis the effects of the process parameters of pp-HMDSO were studied in the application of corrosion protection of an Al surface. The method for polymerising the HMDSO vapour was RF-PECVD. The following process parameters were studied: RF-power, flow of HMDSO, Oxygen as reactive gas,...
| Main Authors: | , |
|---|---|
| Format: | Others |
| Language: | English |
| Published: |
Linköpings universitet, Tunnfilmsfysik
2017
|
| Subjects: | |
| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-149909 |