A study on the effects of the process parameters of polymerised HMDSO using RF-PECVD in corrosion protection applications
In this master thesis the effects of the process parameters of pp-HMDSO were studied in the application of corrosion protection of an Al surface. The method for polymerising the HMDSO vapour was RF-PECVD. The following process parameters were studied: RF-power, flow of HMDSO, Oxygen as reactive gas,...
Main Authors: | Ardic, Madeleine, Gifvars, Anton |
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Format: | Others |
Language: | English |
Published: |
Linköpings universitet, Tunnfilmsfysik
2017
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Subjects: | |
Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-149909 |
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