Growth and Characterization of CrB2/TiB2 Superlattices by Magnetron Sputtering
In the present work, growth and structural characterization of CrB2/TiB2 superlattices on (0001) Al2O3 substrate is studied. The superlattices are grown using a direct current magnetron sputtering (DCMS) system with a base pressure of <9E-7 Torr. For structural characterization X-ray diffract...
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| Format: | Others |
| Language: | English |
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Linköpings universitet, Tunnfilmsfysik
2019
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-159336 |