Reactive Magnetron Sputter Deposition and Characterization of Thin Films from the Ti-Al-N and Sc-Al-N Systems
This Thesis treats the growth and characterization of ternary transition metal nitride thin films. The aim is to probe deeper into the Ti-Al-N system and to explore the novel Sc-Al-N system. Thin films were epitaxially grown by reactive magnetron sputtering from elemental targets onto single-crystal...
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| Format: | Others |
| Language: | English |
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Linköpings universitet, Tunnfilmsfysik
2009
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-17683 http://nbn-resolving.de/urn:isbn:978-91-7393-996-6 |