Thermal Stability of Zr-Si-N Nanocomposite Hard Thin Films

Thermal Stability of Zr-Si-N Nanocomposite Hard Thin Films

Mechanical property and thermal stability of Zr-Si-N films of varying silicon contents deposited on Al2O3 (0001) substrates are characterized. All films provided for characterization were deposited by reactive DC magnetron sputter deposition technique from elemental Zr and Si targets in a N2/Ar plas...

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Bibliographic Details
Main Author: Ku, Nai-Yuan
Format: Others
Language:English
Published: Linköpings universitet, Nanostrukturerade material 2010
Subjects:
Zr-Si-N films
Nanocomposite hard coatings
Nanostructure
Magnetron sputtering
Hardness
Mechanical property
Thermal stability
Annealing
Transmission electron microscopy
X-ray diffraction
Nanoindentation
Elastic recoil detection analysis
Materials science
Teknisk materialvetenskap
Condensed matter physics
Kondenserade materiens fysik
Online Access:http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-58622

Internet

http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-58622

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