Synthesis and Characterisation of Non-Evaporable Getter Films Based on Ti, Zr and V
Non-evaporable getters (NEG) are widely used in ultra high vacuum (UHV) systems for particle accelerators to assure distributed pumping speed. By heating the NEG to an activation temperature, the oxide layer on the surface dissolves into the material, leaving a clean (activated) surface. The activat...
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| Format: | Others |
| Language: | English |
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Linköpings universitet, Plasma och beläggningsfysik
2011
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-77473 |