Magnetron Sputter Epitaxy of GaN Epilayers and Nanorods
In this research, electronic-grade GaN(0001) epilayers and nanorods have been grown onto Al2O3(0001) and Si(111) substrates, respectively, by reactive magnetron sputter epitaxy (MSE) using liquid Ga as a sputtering target. MSE, employing ultra high vacuum conditions, high-purity source materials, an...
| Main Author: | |
|---|---|
| Format: | Doctoral Thesis |
| Language: | English |
| Published: |
Linköpings universitet, Tunnfilmsfysik
2012
|
| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-84655 http://nbn-resolving.de/urn:isbn:978-91-7519-782-1 (print) |