Me-Si-C (Me= Nb, Ti or Zr) : Nanocomposite and Amorphous Thin Films
This thesis investigates thin films of the transition metal carbide systems Ti-Si-C, Nb-Si-C, and Zr-Si-C, deposited at a low substrate temperature (350 °C) with dc magnetron sputtering in an Ar discharge. Both the electrical and mechanical properties of these systems are highly affected by their st...
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| Format: | Others |
| Language: | English |
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Linköpings universitet, Tunnfilmsfysik
2012
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-85830 http://nbn-resolving.de/urn:isbn:978-91-7519-730-2 |