Nucleation and stress generation in thin films deposited with a pulsed energetic deposition flux
This thesis presents fundamental mechanisms of nucleation and early growth of and stress generation in thin polycrystalline metal films deposited using pulsed energetic deposition fluxes. The effects of a pulsed deposition flux and energetic bombardment on film nucleation was investigated using in s...
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| Format: | Others |
| Language: | English |
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Linköpings universitet, Plasma och beläggningsfysik
2013
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-86472 http://nbn-resolving.de/urn:isbn:978-91-7519-706-7 |