Multifunctional nanostructured Ti-Si-C thin films
In this Thesis, I have investigated multifunctional nanostructured Ti-Si-C thin films synthesized by magnetron sputtering in the substrate-temperature range from room temperature to 900 °C. The studies cover high-temperature growth of Ti3SiC2 and Ti4SiC3, low-temperature growth of Ti-Si-C nanocompos...
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| Format: | Doctoral Thesis |
| Language: | English |
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Linköpings universitet, Tunnfilmsfysik
2007
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-8860 http://nbn-resolving.de/urn:isbn:978-91-85715-31-2 |