Microstructural characterization and hardening behavior of reactive magnetron sputtered TiN/Si₃N₄ multilayer thin films
This licentiate thesis adds a new piece to the puzzle that describes how the microstructural characteristics influence the hardness behavior of a multilayer coating. It contains a presentation of the manufacturing and the subsequent characterization of multilayer thin films. These multilayers consis...
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| Format: | Others |
| Language: | English |
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Luleå
2004
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:ltu:diva-26702 |