Study of HfN as seed layer for next generation of BAW RF filters : synthesis, characterization, and investigation of piezoelectric performance
Micro-electro-mechanical systems (MEMS) have become an essential component of a wide range ofelectronic devices over the last decades such as accelerometers, microphones, gas sensors, and filters.During this new millennium, a new radio frequency (RF) technology has been developed to satisfy thetough...
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| Format: | Others |
| Language: | English |
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Luleå tekniska universitet, Institutionen för teknikvetenskap och matematik
2020
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:ltu:diva-80960 |