Identification, Inversion and Implementaion of the Preisach Hysteresis Model in Nanopositioning
Atomic force microscopes offer the possibility for imaging a sample topography with accuracy in the nanometer scale. This kind of performance is impossible without actuators enabling a certain accuracy. A frequently used actuator in such nanopositioning applications is the piezoelectric actuator whi...
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| Format: | Others |
| Language: | English |
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Norges teknisk-naturvitenskapelige universitet, Institutt for teknisk kybernetikk
2014
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:no:ntnu:diva-25744 |