Oxygen and related defects in Czochralski silicon crowns
For the purpose of this thesis work, four n-type CZ silicon ingots with different crown tapered angle and shouldering area were characterized in order to understand the oxygen behavior and related defects on ingot top cuts and its influence on material lifetime. A p-type CZ silicon ingot was also ch...
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| Format: | Others |
| Language: | English |
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Norges teknisk-naturvitenskapelige universitet, Institutt for kjemi
2014
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:no:ntnu:diva-27116 |