Microfabrication of Tungsten, Molybdenum and Tungsten Carbide Rods by Laser-Assisted CVD

Microfabrication of Tungsten, Molybdenum and Tungsten Carbide Rods by Laser-Assisted CVD

Thin films of refractory metals and carbides have been studied extensively over many years because of their wide range of application. The two major techniques used are Chemical Vapour Deposition (CVD) and Physical Vapour Deposition (PVD). These can result in the deposition of two-dimensional blanke...

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Bibliographic Details
Main Author: Björklund, Kajsa
Format: Doctoral Thesis
Language:English
Published: Uppsala universitet, Institutionen för materialkemi 2001
Subjects:
Chemistry
Laser-assisted CVD
tungsten
molybdenum
tungsten carbide
kinetics
field emission
nanocrystalline
Kemi
Online Access:http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-1593
http://nbn-resolving.de/urn:isbn:91-554-5197-7

Internet

http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-1593
http://nbn-resolving.de/urn:isbn:91-554-5197-7

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