Microfabrication of Tungsten, Molybdenum and Tungsten Carbide Rods by Laser-Assisted CVD
Thin films of refractory metals and carbides have been studied extensively over many years because of their wide range of application. The two major techniques used are Chemical Vapour Deposition (CVD) and Physical Vapour Deposition (PVD). These can result in the deposition of two-dimensional blanke...
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| Format: | Doctoral Thesis |
| Language: | English |
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Uppsala universitet, Institutionen för materialkemi
2001
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-1593 http://nbn-resolving.de/urn:isbn:91-554-5197-7 |