Channeling of MeV ion beams : Improving sample alignment at the tandem accelerator, Ångström laboratory

At the Tandem accelerator in the Ångström laboratory, Uppsala, Rutherford backscattering spectrometry (RBS) is one of the methods used for thin film analysis, providing information on thickness and composition. The films are commonly grown on silicon substrates, whose crystal structure gives rise to...

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Bibliographic Details
Main Author: Svensson Sjöbom, Ludvig
Format: Others
Language:English
Published: Uppsala universitet, Tillämpad kärnfysik 2014
Subjects:
RBS
Online Access:http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-230962