Channeling of MeV ion beams : Improving sample alignment at the tandem accelerator, Ångström laboratory
At the Tandem accelerator in the Ångström laboratory, Uppsala, Rutherford backscattering spectrometry (RBS) is one of the methods used for thin film analysis, providing information on thickness and composition. The films are commonly grown on silicon substrates, whose crystal structure gives rise to...
Main Author: | Svensson Sjöbom, Ludvig |
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Format: | Others |
Language: | English |
Published: |
Uppsala universitet, Tillämpad kärnfysik
2014
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Subjects: | |
Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-230962 |
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