Metod för mätning av restspänningar i PVD-beläggningar på tunna substrat
The aim of this project was to, based on a given idea, develop and evaluate a method for measuring residual stress in thin PVD coatings. AlCrN was deposited, by PVD, on thin circular samples of stainless steel foil and the radius of the emerged curvature was measured using an optical profilometer. F...
| Main Authors: | , , , , , , |
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| Format: | Others |
| Language: | Swedish |
| Published: |
Uppsala universitet, Institutionen för teknikvetenskaper
2016
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| Subjects: | |
| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-295939 |