Silicon and Quartz Microengineering : Processing and Characterisation
Microengineering has developed a broad range of production techniques to reduce size, increase throughput, and reduce cost of electrical and mechanical devices. The miniaturisation has also entailed entirely new opportunities. In this work, a piezoresistive silicon sensor measuring mechanical deform...
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| Format: | Doctoral Thesis |
| Language: | English |
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Uppsala universitet, Fasta tillståndets elektronik
2005
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-5852 http://nbn-resolving.de/urn:isbn:91-554-6288-X |