Hollow Cathode Deposition of Thin Films
Thin films of metals and compounds have a very wide range of applications today. Many of the deposition methods used for the production of such films utilize plasma to support the growth the film, e.g. by the supply of energy and the enhancement of reactivity. This thesis focuses on the physical vap...
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| Format: | Doctoral Thesis |
| Language: | English |
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Uppsala universitet, Fasta tillståndets elektronik
2006
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-6925 http://nbn-resolving.de/urn:isbn:91-554-6586-2 |