Modeling for effective computer support to MEMS product development

Microelectromechanical systems (MEMS) are miniaturized devices with high functionality. In recent years, MEMS products have become increasingly dominant in every aspect of the commercial market place. As the MEMS technology is in its infant stage and has several unique features compared to macro-sca...

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Bibliographic Details
Main Author: Sinha, Niraj
Other Authors: Schneider, Kevin
Format: Others
Language:en
Published: University of Saskatchewan 2004
Subjects:
Online Access:http://library.usask.ca/theses/available/etd-04282004-105426/