Kinematic, dynamics, and control of a particular micro-motion system
<p>In many applications such as chip assembly in the semiconductor industry, cell manipulation in biotechnology, and surgery automation in medicine, there is a need for devices which can perform very small motions (less than 100 µm) with very high positioning accuracy (in the submicron range)...
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| Format: | Others |
| Language: | en |
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University of Saskatchewan
2012
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| Online Access: | http://library.usask.ca/theses/available/etd-10032012-154046/ |