Physical and Statistical Analysis of Functional Process Variables for Process Control in Semiconductor Manufacturing
The research aims at modeling and analyzing the interactions among functional process variables (FPVs) for process control in semiconductor manufacturing. Interaction is a universal phenomenon and different interaction patterns among system components might characterize the system conditions. To mon...
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| Format: | Others |
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Scholar Commons
2009
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| Online Access: | https://scholarcommons.usf.edu/etd/102 https://scholarcommons.usf.edu/cgi/viewcontent.cgi?article=1101&context=etd |