Design and Fabrication of Multi – Dimensional RF MEMS Variable Capacitors
In this work, a multi dimensional RF MEMS variable capacitor that utilizes electrostatic actuation is designed and fabricated on a 425um thick silicon substrate. Electrostatic actuation is preferred over other actuation mechanisms due to low power consumption. The RF MEMS variable capacitor is desig...
| Main Author: | |
|---|---|
| Format: | Others |
| Published: |
Scholar Commons
2003
|
| Subjects: | |
| Online Access: | https://scholarcommons.usf.edu/etd/1404 https://scholarcommons.usf.edu/cgi/viewcontent.cgi?article=2403&context=etd |