Testing and Packaging for MEMS Acoustic Emission Sensors

The goal of this research is to improve the structure and dimension of the MEMS acoustic emission sensor. Acoustic emission sensor (AE sensor) based on the piezoelectric transducer is a well-developed technology in non-destructive testing that is widely used to determine permanent...

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Bibliographic Details
Main Author: Liu, Ting-Hung
Format: Others
Published: Scholar Commons 2018
Subjects:
Online Access:https://scholarcommons.usf.edu/etd/7692
https://scholarcommons.usf.edu/cgi/viewcontent.cgi?article=8889&context=etd